Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications

Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro-properties, ferroelectric films, LED research, and materials for memory applications and other thin film applications.Of particular note in this new edition is the coverage of 'reduction to practice,' a phase where the idea for a technology transition from a concept to actual implementation. This section includes chapters that review the most relevant methods to fabricate thin films towards practical applications. The book also discusses the latest applications of various thin film deposition technologies.Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists, engineers, and managers working in academia or semiconductor related R&D. Offers a practical survey of thin film technologies including design, fabrication, and reliabilityCovers core processes and applications in the semiconductor industry and discusses latest advances in new thin film developmentFeatures new chapters that review methods on front-end and back-end thin films INDICE: 1. Introduction: Challenges and Future Directions in NanotechnologyPart I Reduction to Practice2. Process Integration for On-Chip Interconnects3. Sputter Processing4. Epitaxial Thin Film Growth5. CVD Processing and Processes6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization7. Limits of Gate Dielectric ScalingPart II Applications and Limitations8. Reliability Considerations for Thin Film Devices9. Thin Film Development for LED Technologies10. Ferroelectric Thin Films: Applications and Processing Considerations11. Applications of Thin Film in Semiconductor Memories12. Yield Issues and Defect Density in Thin Films

• ISBN: 978-0-443-13523-1
• Editorial: Elsevier
• Encuadernacion: Rústica
• Páginas: 518
• Fecha Publicación: 01/10/2024
• Nº Volúmenes: 1
• Idioma: Inglés