INDICE: Introduction Fundamentals of ion–solid interactions with a focus on the nanoscale Channelling and blocking 1D layers: Limits to depth resolution 2D and 3D objects: Aspects of lateral resolution Porous materials / nanomaterials Instruments Grazing incidence RBS RBS–channelling/blocking High resolution RBS (magnetic or electrostatic filters) MEIS Resonant NRA The place of nanoIBA in the characterisation forest Applications Example of resonances, light element profiling 3D example / quantum dots and nanowires / top down devices Channelling / defect profiling Blocking / strain profiling 3D MEIS / Real space structural analysis Conclusion
- ISBN: 978-1-84821-577-1
- Editorial: ISTE Ltd.
- Encuadernacion: Cartoné
- Páginas: 320
- Fecha Publicación: 04/12/2014
- Nº Volúmenes: 1
- Idioma: Inglés