MEMS Reliability

MEMS Reliability

Hartzell, Allyson L.
da Silva, Mark G.
Shea, Herbert R.

114,39 €(IVA inc.)

The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

  • ISBN: 978-1-4614-2736-0
  • Editorial: Springer
  • Encuadernacion: Rústica
  • Fecha Publicación: 02/01/2013
  • Nº Volúmenes: 1
  • Idioma: Inglés