Resonant MEMS: Principles, Modeling, Implementation and Applications

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting–edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems. INDICE: PART I. FUNDAMENTALS Fundamental Equations Fluid/Structure Interaction Damping Viscoelasticity Material Properties Finite Element Modeling of Resonators PART II. IMPLEMENTATION Capacitive Devices Piezoelectric Devices Thermal Devices NanoDevices Organic Devices Device with Embedded Channels Packaging Tuning and Stability PART III. APPLICATIONS Inertial Sensors Chemical Sensors Biosensors Fluid Properties Sensors Timing Devices Energy Harvesting Devices

• ISBN: 978-3-527-33545-9
• Editorial: Wiley VCH
• Encuadernacion: Cartoné
• Páginas: 450
• Fecha Publicación: 17/12/2014
• Nº Volúmenes: 1
• Idioma: Inglés